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UHV Transfer Systems, Inc.
UHV Transfer Systems, Inc.
  • Home
  • About UHV
  • Products
    • Sample Transfer Devices / Precision Magnetic Manipulators
      • Rotary Manipulators / Feedthrough
      • PMM Add-Ons and Accessories
      • UHV Wobble Sticks
    • Loadlock & Substrate/Wafer Transfer Systems
      • 200mm Wafer Transfer & Loadlock
      • 300mm Wafer Transfer & Loadlock
      • 450mm Wafer Transfer & Loadlock
      • Carousel & Loadlock Transfer System
      • Vacuum Cassette Elevator (VCE)
      • CFF Mounting Flange Type
      • NW Mounting Flange Type
      • ISO Mounting Flange Type
    • Vacuum Suitcases
      • PHI 1 inch Pucks
      • National Renewable Energy Lab (NREL) Transport Pod
      • National Institute of Standards & Technology (NIST) Omicron
      • University Large Substrate
    • Custom System Solutions
      • Wafer Cleaning Tools
      • Exposure Systems
      • Reticle Polishing Tools
      • National Renewable Energy Lab (NREL) Transfer Systems
      • SMIF Pod Openers
      • Custom Chambers & Heating/Cooling Systems
    • Motion Control Components & Systems
      • Linear Stage
      • XY Stage
      • XYZ Stage
      • XYZT Stage
      • Bearings
      • Motors
      • Screws
      • Vacuum Sensors & Switches
  • Contact
  • HOME
  • Products
  • Sample Transfer Devices / Precision Magnetic Manipulators
  • Rotary Manipulators / Feedthrough
  • High Performance Precision Magnetic Manipulator (PMM) with Linear and Linear/Rotary Motion

High Performance Precision Magnetic Manipulator (PMM) with Linear and Linear/Rotary Motion

All units are manufactured to customer specified travel lengths and are easily customized for unique applications. PMMs can be operated manually or combined with motorized drive assemblies.

  • DESCRIPTION
  • SPECIFICATIONS
  • DIAGRAM

High performance PMMs handle a higher de-coupling force and torque and exhibit better compliance than typically expected from a magnetically-coupled transporter. This increased force and torque results in greater tactile feedback and lower backlash. Available with linear-only and linear/rotary motion, PMMs are manufactured with all-metal internal construction for use in high vacuum, ultra-high vacuum or controlled environments. These transporters are bakeable to 250°C. This high decoupling force allows positioning to be vertical as well as horizontal.

Patented independent linear and rotary motion is the key to versatility in Models DBLRP and DBLRM. Dual shafts—a round rotation shaft contained within a strong, hollow, square, linear shaft, allow numerous variations in sample movement. Both shafts travel in the linear direction as the magnet carriage is moved forward. Rotating the magnet carriage rotates the inner shaft only. This rotating shaft can be used to operate clamping devices, vertical lift mechanisms, locks and rotatable stages. Typical accessories are shown in PMM Accessories. Models DBLRP and DBLRM meet the same performance specifications but the difference in “feel” during transfer makes each preferred for different applications.

For linear-only motion, the Models DBLOP and DBLOM have the same high-decoupling strength described above. The strong, square hollow shaft that extends during transfer exhibits minimal droop over long transfer distances.

The magnet carriages of the Models DBLRM and DBLOM roll on steel bearings. These units are ideal for applications where excellent tactile feedback is desired or for high duty-cycle use. The Models DBLRP and DBLOP use polymeric bushings in the magnet carriage (outside of vacuum) to glide along the outer tube. These units are for use where a slight stiction is preferred.

MODEL DBLRP, DBLRM, DBLOP, DBLOM
Material
Flange, Outer tube and square shaft 304ss
Actuator Housing Anodized Aluminum
Performance
Vacuum Range 1×10-11 Torr
Linear Decoupling 26 lbs.
Rotary Torque 12 in-lbs*
Rotary Compliance 2 degrees/in-lb*
Mounting 2.75″ CF
* Not applicable for DBLOP/DBLOM
See PMM Datasheet for more specifications
Specifications subject to change without notice.

Related Products

High Performance Precision Magnetic Manipulator (PMM) with Linear and Linear/Rotary Motion

DBLOP/DBLOM

High Performance Precision Magnetic Manipulator (PMM) with Linear and Linear/Rotary Motion

DBLRP/DBLRM

Customized Magnetic Manipulators

Category: Rotary Manipulators / Feedthrough
  • Sample Transfer Devices / Precision Magnetic Manipulators
    • Rotary Manipulators / Feedthrough
    • PMM Add-Ons and Accessories
    • UHV Wobble Sticks
  • Loadlock & Substrate/Wafer Transfer Systems
  • Vacuum Suitcases
  • Custom System Solutions
  • Motion Control Components & Systems