MODEL ALDEF DYNAMIC END EFFECTOR

For use in a chamber with no vertical lift capability, a Dynamic End Effector attached to a Precision Magnetic Manpulator, can deliver a substrate into a vacuum system and lower that substrate onto the receiving stage within the process chamber. After processing, the ALDEF returns to lift the substrate to be withdrawn for removal. Standard Dynamic End Effectors are available with .276, 0.5 and 1.0 inch vertical motion.