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UHV Transfer Systems, Inc.
UHV Transfer Systems, Inc.
  • Home
  • About UHV
  • Products
    • Sample Transfer Devices / Precision Magnetic Manipulators
      • Rotary Manipulators / Feedthrough
      • PMM Add-Ons and Accessories
      • UHV Wobble Sticks
    • Loadlock & Substrate/Wafer Transfer Systems
      • 200mm Wafer Transfer & Loadlock
      • 300mm Wafer Transfer & Loadlock
      • 450mm Wafer Transfer & Loadlock
      • Carousel & Loadlock Transfer System
      • Vacuum Cassette Elevator (VCE)
      • CFF Mounting Flange Type
      • NW Mounting Flange Type
      • ISO Mounting Flange Type
    • Vacuum Suitcases
      • PHI 1 inch Pucks
      • National Renewable Energy Lab (NREL) Transport Pod
      • National Institute of Standards & Technology (NIST) Omicron
      • University Large Substrate
    • Custom System Solutions
      • Wafer Cleaning Tools
      • Exposure Systems
      • Reticle Polishing Tools
      • National Renewable Energy Lab (NREL) Transfer Systems
      • SMIF Pod Openers
      • Custom Chambers & Heating/Cooling Systems
    • Motion Control Components & Systems
      • Linear Stage
      • XY Stage
      • XYZ Stage
      • XYZT Stage
      • Bearings
      • Motors
      • Screws
      • Vacuum Sensors & Switches
  • Contact
  • HOME
  • Products
  • Sample Transfer Devices / Precision Magnetic Manipulators
  • Rotary Manipulators / Feedthrough
  • PMM-Lite, Precision Magnetic Manipulator with Linear and Rotary Motion

PMM-Lite, Precision Magnetic Manipulator with Linear and Rotary Motion

  • DESCRIPTION
  • SPECIFICATIONS
  • DIAGRAM
  • CUSTOM CAPABILITIES

The PMM-Lite™, Model MASLR, is a single-shaft precision magnetic manipulator that is ideal for simple transfer requiring linear and rotary motion. The PMM-Lite is less expensive but comparable to the high performance Models DBLRP and DBLRM with respect to linear force, tactile feedback and accurate sample manipulation. These transporters are UHV compatible with only metal parts exposed to vacuum and are bakeable to 250°C.

The PMM-Lite offers very competitive linear force and torque to that of other conventional manipulators. It has the same solid “feel” of the high performance UHV Transfer Precision Magnetic Manipulators. The magnet carriage of the Model MASLR glides along the outer tube on polymeric bushings (outside of vacuum) providing a slight amount of stiction.

All units are manufactured to customer specified travel lengths and are easily customized for unique applications. PMMs can be operated manually or combined with motorized drive assemblies.

MODEL MASLR, PMM-Lite
Material
Flange, outer tube and square shaft 304ss
Actuator Housing Anodized Aluminum
Performance
Vacuum Range 1×10-11 Torr
Linear Decoupling 13 lbs.
Rotary Torque 8 in-lbs*
Rotary Compliance 4 degrees/in-lb*
Mounting 2.75″ CF

Specifications subject to change without notice.

CUSTOMIZED MAGNETIC MANIPULATORS

Quartz Shaft

Precision Magnetic Manipulators can be customized to meet a wide range of configurations. Internal shafts can be machined with threads, threaded holes, flats or slots. Shafts can be constructed of different materials such as the quartz shaft shown for use in a furnace. Optional items such as bakeable magnets and configurations with triple the de-coupling force are just a few examples. Call us to discuss your requirements.

Categories: Rotary Manipulators / Feedthrough, Sample Transfer Devices / Precision Magnetic Manipulators
  • Sample Transfer Devices / Precision Magnetic Manipulators
    • Rotary Manipulators / Feedthrough
    • PMM Add-Ons and Accessories
    • UHV Wobble Sticks
  • Loadlock & Substrate/Wafer Transfer Systems
  • Vacuum Suitcases
  • Custom System Solutions
  • Motion Control Components & Systems